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ELS5000 Electron Source

Electron gun and power supply

The ELS 5000 is a general purpose electron gun which is ideal for Static Auger.

 
Features of the ELS5000 electron source
  • Great specifications at an attractive price.
  • Beam energy 0 - 5000 eV
  • Beam current 10 nA to 300 uA
  • Spot size/Beam Current < 50um - 1 uA, <100 um - 20 uA
  • Working distance 15 mm to 75 mm
  • Easy to replace and align filament
  • Beam positioning on sample by XY deflection
  • 70 mm CF flange.
  • Fully bakeable and UHV compatible
  • Optional sample imaging unit - TV rate raster unit with monitor and pre-amplifier for connection to isolated sample.
 

Topac Inc 231 CJC Highway, Cohasset MA 02025 USA
Tel: 781 740 8778 Fax: 781 740 8779 e-mail: sales@topac.com


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